IEBL Report - Detail view

Identifier 52
Journal Applied Physics Letters
Author(s): Yoontae Hwang, Binh-Minh Nguyen, Shadi A. Dayeh
Title Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
Pages 263115
Volume 103
doi doi: 10.1063/1.4858964
BibTeX:

@article{iebl_2013_52,
  title = "{Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing}",
  author = "{Yoontae Hwang, Binh-Minh Nguyen, Shadi A. Dayeh}",
  journal = "{Applied Physics Letters}",
  volume = "{103}",
  number = "{26}",
  year = "{2013}",
}

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