Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing

Authors
Yoontae Hwang, Binh-Minh Nguyen, Shadi A. Dayeh
doi
10.1063/1.4858964
Identifier
52
Volume
103
Pages
263115
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BibTeX
@article{iebl_2013_52,
title = "{Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing}",
author = "{Yoontae Hwang, Binh-Minh Nguyen, Shadi A. Dayeh}",
journal = "{Applied Physics Letters}",
volume = "{103}",
number = "{26}",
year = "{2013}",
}
Publication Year
2013
Publication Type
Journal Articles
Journal
Applied Physics Letters