In-situ Control of Synchronous Germanide/Silicide Reactions with Ge/Si Core/Shell Nanowires to Monitor Formation and Strain Evolution in Abrupt 2.7nm Channel Length

Authors
Renjie Chen, Binh-Minh Nguyen, Wei Tang, Yang Liu, Jinkyoung Yoo, and Shadi Dayeh, Accepted
doi
10.1063/1.4983835
Identifier
80
Volume
110
Pages
213103
Publication Image
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Publication Year
2017
Publication Type
Journal Articles
Journal
Applied Physics Letters