Micromachined infrared bolometers on flexible polyimide substrates

Authors
Shadi A. Dayeh, Donald P. Butler, Zeynep Çelik-Butler
doi
10.1016/j.sna.2004.07.009
Identifier
1
Volume
118
Pages
49--56
BibTeX
@article{iebl_2005_1,
title = "{Micromachined infrared bolometers on flexible polyimide substrates}",
author = "{Shadi A. Dayeh, Donald P. Butler, Zeynep Çelik-Butler}",
journal = "{Sensors and Actuators A: Physical}",
volume = "{118}",
number = "{1}",
year = "{2005}",
}
Publication Year
2005
Publication Type
Journal Articles
Journal
Sensors and Actuators A: Physical